Bộ điều khiển lưu lượng EL-FLOW SELECT F-221M Bronkhorst Vietnam
Nhà cung cấp: Pitesco
Hãng sản xuất: Bronkhorst
0392.407.993
Bộ điều khiển lưu lượng EL-FLOW SELECT F-221M Bronkhorst Vietnam
EL-FLOW SELECT F-221M
High-Pressure Mass Flow Controller for Gases
- High accuracy, excellent repeatability
- Fast response
- Operating pressure / delta-P up to 200 bar
- Compact design
- Virtually pressure and temperature independent
Technical specifications
| Measurement / control system | |
|---|---|
| Flow range, based on N2 (intermediate ranges available) |
min. 0,3…15 mln/min max. 0,4…20 ln/min |
| Accuracy (incl. linearity) (based on actual calibration) |
±0,5% Rd plus ±0,1%FS |
| Turndown | 1:50 |
| Multiple fluid capability | storage of max. 8 calibration curves |
| Repeatability | < 0,2% Rd |
| Settling time (controller) | typical 2 seconds |
| Control stability | < ±0,1% FS (typical for 1 ln/min N2) |
| Max. Kv-value | 1,5 x 10-3 |
| Operating temperature | -10…+70°C |
| Temperature sensitivity | zero: < 0,05% FS/°C; span: < 0,05% Rd/°C |
| Pressure sensitivity | 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 |
| Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
| Attitude sensitivity | max. error at 90° off horizontal 0,2% at 1 bar, typical N2 |
| Warm-up time | 30 min. for optimum accuracy 2 min for accuracy ± 2% FS |
| Mechanical parts | |
|---|---|
| Material (wetted parts) | stainless steel 316L or comparable |
| Pressure rating | 200 bar abs |
| Min. ΔP | 2 bar dif. |
| Max. ΔP | 200 bar dif. |
| Process connections | compression type or face seal couplings |
| Seals | Standard: Viton®; option: Kalrez® |
| Weight | 0,9 kg |
| Ingress protection (housing) | IP40 |
| Electrical properties | |||
|---|---|---|---|
| Power supply | +15…24 Vdc | ||
| Max. power consumption | Supply 15 V 24 V |
at voltage I/O 290 mA 200 mA |
at current I/O 320 mA 215 mA |
| PROFIBUS DP | add 53 mA (15 V supply) or 30 mA (24 V supply) | ||
| PROFINET | add 77 mA (15 V supply) or 48 mA (24 V supply) | ||
| EtherCAT® | add 66 mA (15 V supply) or 41 mA (24 V supply) | ||
| DeviceNet™ | add 48 mA (24 V supply) | ||
| Analog output/command | 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||
| Digital communication | standard: RS232; options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS |
||
| Electrical connection | |
|---|---|
| Analog/RS232 | 9-pin D-connector (male); |
| PROFIBUS DP | bus: 9-pin D-connector (female); power: 9-pin D-connector (male); |
| Devicenet™ | 5-pin M12-connector (male); |
| EtherCAT®/ PROFINET | 2 x RJ45 modular jack (in/out) |
| FLOW-BUS/Modbus-RTU/ASCII | RJ45 modular jack |
