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Bộ điều khiển lưu lượng nhiệt EL-FLOW SELECT F-201CS Bronkhorst Vietnam

 

EL-FLOW SELECT F-201CS

Thermal Mass Flow Controller with Integrated Shut-Off Valve

  • Fast response
  • High accuracy and repreatability
  • Integrated shut-off valve for extra efficiency or safety
  • Virtually pressure and temperature independent
  • Compact design

Technical specifications

 

Measurement / control system
Flow range, based on N2
(intermediate ranges available)
min. 0,2…10 mln/min
max. 0,8…15 ln/min
Accuracy (incl. linearity)
(based on actual calibration)
±0,5% Rd plus ±0,1% FS
Turndown 1:50 (in digital mode up to 1:187,5)
Multiple fluid capability storage of max. 8 calibration curves
Repeatability < 0,2% Rd
Settling time (controller) standard: 1…2 seconds
option: down to 500 msec
Control stability < ±0,1% FS (typical for 1 ln/min N2)
Max. Kv-value 6,5 x 10-2
Operating temperature -10…+70°C
Temperature sensitivity zero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Leak integrity, outboard tested < 2 x 10-9 mbar l/s He
Attitude sensitivity max. error at 90° off horizontal 0,2% at 1 bar, typical N2
Warm-up time 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable
Pressure rating 10 bar abs
Max. ΔP 3 bar dif.
Process connections compression type or face seal couplings
Seals standard: Viton®;
options: EPDM, Kalrez® (FFKM)
Weight 1,1 kg
Ingress protection (housing) IP40
Electrical properties
Power supply +15…24 Vdc
Max. power consumption Supply
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
Shut-off valve (N/C) +24 Vdc, 3 W; using a shut-off control adapter reduces the power consumption
PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 77 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)
DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 9-pin D-connector (male);
PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
Devicenet™ 5-pin M12-connector (male);
EtherCAT®/ PROFINET 2 x RJ45 modular jack (in/out)
FLOW-BUS/Modbus-RTU/ASCII RJ45 modular jack