Bộ điều khiển dòng chảy EL-FLOW METAL SEALED F-201CM Bronkhorst Vietnam
Nhà cung cấp: Pitesco
Hãng sản xuất: Bronkhorst
0392.407.993
Bộ điều khiển dòng chảy EL-FLOW METAL SEALED F-201CM Bronkhorst Vietnam
EL-FLOW METAL SEALED F-201CM
Metal Sealed Mass Flow Controller for Gases
- Patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere)
- Electropolished wetted parts
- Cleanroom asembled
- High accuracy, excellent repeatability
- Multi Gas / Multi Range functionality (option)
- Fast settling time (down to 600 msec)
Technical specifications
| Measurement / control system | |
|---|---|
| Flow range, based on N2 (intermediate ranges available) |
min. 0,12…6 mln/min max. 1…50 ln/min |
| Accuracy (incl. linearity) (based on actual calibration) |
±0,5% Rd plus ±0,1% FS |
| Repeatability | < 0,2% Rd |
| Turndown | 1 : 50 (in digital mode up to 1 : 150) |
| Settling time | 1 second typical above 5% FS; option: down to 600 msec |
| Control stability | ± 0.05% FS (typical for 1 slm N2) |
| Max. operating pressure | 1000 psig (64 bar) |
| Temperature sensitivity | zero: < 0.05% FS/°C; span: < 0.05% Rd/°C |
| Pressure sensitivity | < 0,1% Rd/bar typical N2; < 0,01% Rd/bar H2 |
| Warm-up time | 30 min. for optimum accuracy 2 min for accuracy ± 2% FS |
| General performance | |
|---|---|
| Operating temperature | -10…+70°C (Viton or EPDM valve seat); 0…70°C (NC valve with Kalrez 6375 seat); 0…50°C (NO valve with Kalrez 6375 seat) |
| Leak integrity (outboard) | < 2 x 10-11 Pa.m3/s He |
| Leak-by through closed valve | < 10-5 Pa.m3/s He |
| Attitude sensitivity | may be mounted in any position |
| Mechanical parts | |
|---|---|
| Material (wetted parts) | stainless steel 316L or comparable |
| Process connections | 1/4” face seal male |
| Seals |
Outer seals: metal-to-metal (no rings); |
| Weight | 0,7 kg |
| Ingress protection (housing) | IP40 |
| Electrical properties | |||
|---|---|---|---|
| Power supply | +15…24 Vdc | ||
| Max. power consumption (controllers based on normally closed valve, pin 5 not used) |
Supply 15 V 24 V |
at voltage I/O 290 mA 200 mA |
at current I/O 320 mA 215 mA |
| If applicable: PROFIBUS DP | add 53 mA (15 V supply) or 30 mA (24 V supply) | ||
| PROFINET | add 77 mA (15 V supply) or 48 mA (24 V supply) | ||
| EtherCAT® | add 66 mA (15 V supply) or 41 mA (24 V supply) | ||
| DeviceNet™ | add 48 mA (24 V supply) | ||
| Analog output/command | 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||
| Digital communication | standard: RS232; options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS |
||
| Electrical connection | |
|---|---|
| Analog/RS232 | 9-pin D-connector (male); |
| PROFIBUS DP | bus: 9-pin D-connector (female); power: 9-pin D-connector (male); |
| Devicenet™ | 5-pin M12-connector (male); |
| EtherCAT®/PROFINET | 2 x RJ45 modular jack (in/out) |
| Modbus/FLOW-BUS | RJ45 modular jack |
