Bộ điều khiển lưu lượng EL-FLOW PRESTIGE FG-200CVP Bronkhorst Vietnam
Nhà cung cấp: Pitesco
Hãng sản xuất: Bronkhorst
0392.407.993
Bộ điều khiển lưu lượng EL-FLOW PRESTIGE FG-200CVP Bronkhorst Vietnam, đại lý Bronkhorst Vietnam
EL-FLOW PRESTIGE FG-200CVP (P-INSENSITIVE)
High Performance Mass Flow Controller for Gases
- Static and dynamic pressure correction
- On-board gas conversion model (Multi-Fluid / Multi-Range)
- 100 unique gases embedded
- User configurable I/O functions
- Significantly reduced power consumption
- Further advances in flow-signal processing
- Highly stable flow control regime virtually impervious to process fluctuations
- Advanced control valve design
Technical specifications
| Measurement / control system | |
|---|---|
| Flow range, based on N2 (intermediate ranges available) |
min. 0,014…0,7 mln/min max. 0,18…9 mln/min |
|
Accuracy (incl. linearity) |
±0,5% Rd plus ±0,1%FS |
| Repeatability | < 0,2% Rd |
| Turndown | 1 : 150; in analog mode 1 : 50 |
| Multi Gas/Multi Range | embedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. |
| Settling time (in control, typical) |
fast: < 500 msec standard: < 1 sec slow: < 2 sec |
| Control stability | ≤ ± 0,1% FS (typical for 1 ln/min N2) |
| Max. Kv-value | 6,6 x 10-2 |
| Operating temperature | -10…70°C |
| Temperature sensitivity | zero: < 0,02% FS/°C; span: < 0,025% Rd/°C |
| Pressure sensitivity | < 0,15% Rd/bar typical N2; < 0,02% Rd/bar N2 (incl. pressure correction option) |
| Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
| Attitude sensitivity | max. error at 90º off horizontal 0,07% FS at 1 bar, typical N2 |
| Warm-up time | 30 min. for optimum accuracy |
| Mechanical parts | |
|---|---|
| Material (wetted parts) | stainless steel 316L or comparable, degreased for use on oxygen (O2) |
| Pressure rating | 10 bar (g) |
| Process connections | compression type or face seal couplings |
| Seals | standard: Viton® options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compounds |
| Weight | 0,8 kg |
| Ingress protection (housing) | IP40 |
| Electrical properties | |||
|---|---|---|---|
| Power supply | +15…24 Vdc | ||
| Max. power consumption (based on normally closed valve, pin 5 not used) |
Supply 15 V 24 V |
at voltage I/O 202 mA 128 mA |
at current I/O 225 mA 146 mA |
| If applicable: PROFIBUS DP | add 53 mA (15 V supply) or 30 mA (24 V supply) | ||
| PROFINET | add 76 mA (15 V supply) or 48 mA (24 V supply) | ||
| EtherCAT® | add 66 mA (15 V supply) or 41 mA (24 V supply) | ||
| DeviceNet™ | add 48 mA (24 V supply) | ||
| Analog output/command | 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||
| Digital communication | standard: RS232; options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS |
||
| Electrical connection | |
|---|---|
| Analog/RS232 | 9-pin D-connector (male); |
| PROFIBUS DP | bus: 9-pin D-connector (female); power: 9-pin D-connector (male); |
| Devicenet™ | 5-pin M12-connector (male); |
| EtherCAT®/PROFINET | 2 x RJ45 modular jack (in/out) |
| Modbus/FLOW-BUS | RJ45 modular jack |
| CE | EMC 2014/30/EU, RoHS 2011/65/EU, |
| IEC 61010-1 | 2010 |
