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Bộ điều khiển lưu lượng EL-FLOW PRESTIGE FG-200CV Bronkhorst Vietnam, đại lý Bronkhorst Vietnam

 

EL-FLOW PRESTIGE FG-200CV

High Performance Mass Flow Controller for Gases

  • On-board gas conversion model (Multi-Fluid / Multi-Range)
  • 100 unique gases embedded
  • User configurable I/O functions
  • Significantly reduced power consumption
  • Further advances in flow-signal processing
  • Highly stable flow control regime virtually impervious to process fluctuations
  • Advanced control valve design

Technical specifications

 

Measurement / control system
Flow range, based on N2
(intermediate ranges available)
min. 0,014…0,7 mln/min
max. 0,18…9 mln/min
Accuracy (incl. linearity)
(based on actual calibration)
standard: ±0,5% Rd plus ±0,1%FS
(±0,8% Rd plus ±0,2% FS for ranges 3...5 mln/min;
±1% Rd plus ±1% FS for ranges < 3 mln/min)
Repeatability < 0,2% Rd
Turndown 1 : 150; in analog mode 1 : 50
Multi Gas/Multi Range embedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases.
Settling time
(in control)
< 2 sec
Control stability ≤ ± 0,1% FS (typical for 1 ln/min N2)
Max. Kv-value 6,6 x 10-2
Operating temperature -10…70°C
Temperature sensitivity zero: < 0,02% FS/°C; span: < 0,025% Rd/°C
Pressure sensitivity < 0,15% Rd/bar typical N2;
< 0,02% Rd/bar N2 (incl. pressure correction option)
Leak integrity, outboard tested < 2 x 10-9 mbar l/s He
Attitude sensitivity max. error at 90º off horizontal 0,07% FS at 1 bar, typical N2
Warm-up time 30 min. for optimum accuracy
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable, degreased for use on oxygen (O2)
Pressure rating 64 bar (g)
Process connections compression type or face seal couplings
Seals standard: Viton®
options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compounds
Weight 0,7 kg
Ingress protection (housing) IP40
Electrical properties
Power supply +15…24 Vdc
Max. power consumption
(based on normally closed valve, pin 5 not used)
Supply
15 V
24 V
at voltage I/O
202 mA
128 mA
at current I/O
225 mA
146 mA
If applicable: PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 76 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)
DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 9-pin D-connector (male);
PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
Devicenet™ 5-pin M12-connector (male);
EtherCAT®/PROFINET 2 x RJ45 modular jack (in/out)
Modbus/FLOW-BUS RJ45 modular jack
CE EMC 2014/30/EU, RoHS 2011/65/EU,
IEC 61010-1 2010